Vacuum BlackTM Coating

  • EUV to SWIR
  • Typical applications: semiconductor manufacturing equipment, AOI, medical, automotive, space opto-mechanics
  • Essentially zero outgassing
  • Ultra high vacuum (UHV) compatible
  • Operating temperature range: -269°C to 450°C
  • High cleanliness - clean-room grade
  • Only a few microns thick
  • Can be applied on all metals, ceramics, glass and polymers
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Specifications
Adhesion
Metals, glass, ceramics, polymers
Adhesion test (ref ECSS-Q-ST-13C)
Coated pieces withstand scotch tape test (3M853 Crystal Clear tape, strength of 13N per 25mm), without any evidence of coating removal.
Outgassing CVCM (%)
0.001
Outgassing RML (%)
0.2
Coating chemical content
Completely inorganic
Surface resistivity
≤2X10^3Ω/□
Cleanability
"Coated pieces withstand cleaning with ethanol, IPA or acetone with no change in optical and technical characteristics. Magic Black™, Metal Velvet™ and Litho Black™ should be cleaned very gently."
Parts shape
3D
Humidity Resistance
MIL-C-48497A
Certificates
ROHS, REACH, ISO 9001:2015, AS9100
Typical Properties

 

Vacuum black reflectance chart 1/10 scale

 

Vacuum black reflectance chart 1:1 scale

 

Operational wavelengths
EUV-SWIR
Typical coating thickness
3-7µm
Emissivity 3-10µm
>95
Emissivity 3-30µm
>85
Working temperature (°C)
-269 to 380 (°C)
Working temperature (°K)
4 to 653 (°K)
Weight of coating (mg/cm²)
0.7 - 1.1 (mg/cm²)
Moderate abrasion resistance
ref MIL-C-48497A
Additional Details

Vacuum BlackTM is chosen where very low reflectance / high emissivity is required in the EUV — UV and VIS to SWIR regions – typically for stray light suppression.

Vacuum BlackTM is in extensive use in many applications including semiconductor manufacturing, space, medical such as endoscopes, and automotive LIDAR & ADAS.

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